Fabrication of Encapsulation and Characteristics of Cathode Material about All-Solid-State Thin Film Batteries
Po-Ti Chen1*, Chih-Jung Chen2, Chieh-Wei Chen2, Shu-Fen Hu1, Ru-Shi Liu2
1Department of Physics, National Taiwan Normal University, Taipei, Taiwan
2Department of Chemistry, National Taiwan University, Taipei, Taiwan
* presenting author:陳柏棣, email:c12111@livemail.tw
All-solid-state thin film lithium batteries which can be fabricated by thin film deposition technology are able to be formed into any shape. We use the radio frequency magnetron sputtering method to deposit the lithium cobalt oxide (LiCoO2) on the silicon or mica substrate. Mica substrate is a flexible material which let the thin film batteries (TFBs) stack at the required site of electronic devices. The as-deposited LiCoO2 film was heat-treated by rapid thermal annealing (RTA) technology which makes the LiCoO2 thin films crystalline structure.
The encapsulation protected the all-solid-state thin film batteries from the exposure to air contamination and destruction. The aromatic polyurea was functioned as the encapsulation. 4,4’-diphenylmethane diisocyanate (MDI) and 4,4’-diaminodiphenylmethane (MDA) were utilized to manufacture the aromatic polyurea films by vapor deposition polymerization.
Finally, we use X-ray diffraction (XRD) to characterize the crystallinity of LiCoO2 films and scanning electron microscopic images to analyze the cross-section and surface. Infrared spectroscopy identifies and studies the characteristics of the molecules structure.

Keywords: All-Solid-State Thin Film Batteries