Gas sensor fabricated on ZnO nanowire arrays
Yu-Lin, Chen1*, Mon-Shu, Ho2
1Insitute of Nanoscience, National Chung Hsing University, Taichung, Taiwan
2Department of Physics, National Chung Hsing University, Taichung, Taiwan
* presenting author:陳宥霖,
The performance of the fabricated sensors with ZnO nanowire arrays are determined in our study, including the opto-electric properties, sensitivity and reliability. ZnO nanowires are synthesized by hydrothermal method on ZnO seed layers made by magnetron sputtering. The structure, morphology and chemical analysis of nanowires were then investigated by scanning electron microscopy, transmission electron microscopy, X-ray diffraction, and energy-dispersive X-ray spectroscopy. We used photolithography to make arrayed electrode, and align and position single nanowires onto the electrodes by dielectrophoresis to make gas sensors. Our results shows that the fabricated sensors have good sensitivity and reliability.

Keywords: ZnO, nanowire, gas sensor